Title:
ダイシング切削水用添加剤及びそれを使用した切削加工方法
Document Type and Number:
Japanese Patent JP5253765
Kind Code:
B2
Inventors:
Hosaka Masaki
Beppu Koji
Kondo Keiei
Hideaki Otani
Toshiyuki Sakai
Tomoko Ichinozawa
Beppu Koji
Kondo Keiei
Hideaki Otani
Toshiyuki Sakai
Tomoko Ichinozawa
Application Number:
JP2007177276A
Publication Date:
July 31, 2013
Filing Date:
July 05, 2007
Export Citation:
Assignee:
ADEKA CORPORATION
Disco Co., Ltd.
Disco Co., Ltd.
International Classes:
C10M173/02; C10M149/10; H01L21/301; C10N20/04; C10N30/00; C10N30/04; C10N40/22
Domestic Patent References:
| JP2007152858A | ||||
| JP7331229A | ||||
| JP2002167589A |
Attorney, Agent or Firm:
Michiharu Soga
Hidetoshi Furukawa
Suzuki Kenchi
Kajinami order
Kazuhiro Oyaku
Hidetoshi Furukawa
Suzuki Kenchi
Kajinami order
Kazuhiro Oyaku