Title:
清掃方法、露光方法及びデバイス製造方法、清掃部材及びメンテナンス方法
Document Type and Number:
Japanese Patent JP5257822
Kind Code:
B2
Inventors:
Yuichi Shibasaki
Application Number:
JP2006356568A
Publication Date:
August 07, 2013
Filing Date:
December 28, 2006
Export Citation:
Assignee:
NIKON CORPORATION
International Classes:
H01L21/027; G03F7/20
Domestic Patent References:
| JP2003224067A | ||||
| JP2004349648A | ||||
| JP2006013308A | ||||
| JP2002164267A |
Attorney, Agent or Firm:
Atsushi Tateishi