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Title:
多層セラミック基板およびその製造方法
Document Type and Number:
Japanese Patent JP5263226
Kind Code:
B2
Abstract:
In order to enable non-shrinkage firing, the strength of a multilayer ceramic substrate is increased which is obtained by a method in which alternately stacking a base material layer and a constrained layer which is not sintered at the sintering temperature for the base material layer, and in a firing step, allowing the material of the base material layer to flow into the constrained layer while subjecting the base material layer to sintering, thereby achieving the densification of the constrained layer. The base material layer and the constrained layer each include celsian (BaAl 2 Si 2 O 8 ), and the abundance of celsian is lower in the base material layer than in the constrained layer. In order to increase the strength of the base material layer, the addition of a Ti component, rather than an increased content of Al component which interferes with sintering of the base material layer, causes fresnoite (Ba 2 TiSi 2 O 8 ) to be deposited in the base material layers. The presence of fresnoite in the base material layers increases crystal grain boundaries in the base material layers, and thus allows the development of cracking to be prevented, thereby allowing the strength of the multilayer ceramic substrate to be improved.

Inventors:
Motoie Machiko
Takahiro Sumi
Application Number:
JP2010152713A
Publication Date:
August 14, 2013
Filing Date:
July 05, 2010
Export Citation:
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Assignee:
MURATA MANUFACTURING CO.,LTD.
International Classes:
H05K3/46; B28B11/00
Domestic Patent References:
JP2008270741A
JP2005298259A
JP2008085040A
JP2003347732A
JP2008053525A
JP2006001755A
JP48048999A
JP2003221277A
Attorney, Agent or Firm:
Masaaki Koshiba