Title:
照明システム、リソグラフィ装置、及び放射ビームの偏光を制御する方法
Document Type and Number:
Japanese Patent JP5265721
Kind Code:
B2
Abstract:
An illumination system comprising a polarization member which comprises first and second polarization modifiers each connected to an actuator configured to move a respective polarization modifier into at least partial intersection with a radiation beam such that the polarization modifier applies a modified polarization to at least part of the radiation beam, and an array of individually controllable reflective elements which is positioned to receive the radiation beam after it has passed the polarization member, the illumination system further comprising a controller capable of controlling the actuators such that the first and second polarization modifiers intersect with different portions of the radiation beam.
Inventors:
Mulder, Heine, Mele
Hansen, Stephen, George
Markens, Johannes, Catherine, Herbertus
Deguenter, Marx
Hansen, Stephen, George
Markens, Johannes, Catherine, Herbertus
Deguenter, Marx
Application Number:
JP2011056066A
Publication Date:
August 14, 2013
Filing Date:
March 15, 2011
Export Citation:
Assignee:
AS M Netherlands B.V.
Carl Zeiss SGM Gaehha
Carl Zeiss SGM Gaehha
International Classes:
H01L21/027; G02B19/00; G03F7/20
Domestic Patent References:
| JP2002116414A | ||||
| JP2003248118A | ||||
| JP2007227918A | ||||
| JP2009516367A |
Attorney, Agent or Firm:
Yoshiyuki Inaba
Toshifumi Onuki
Toshifumi Onuki
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