Title:
プローブカードの製造方法
Document Type and Number:
Japanese Patent JP5266155
Kind Code:
B2
Inventors:
Hirofumi Nakano
Application Number:
JP2009170529A
Publication Date:
August 21, 2013
Filing Date:
July 21, 2009
Export Citation:
Assignee:
Nippon Electronic Materials Co., Ltd.
International Classes:
G01R1/073; H01L21/66
Domestic Patent References:
| JP2008286657A | ||||
| JP5203519A | ||||
| JP2007208230A | ||||
| JP4162696A | ||||
| JP2001281268A | ||||
| JP7234248A |
Foreign References:
| WO2009013809A1 |
Attorney, Agent or Firm:
Satoshi Otsuki