Title:
照明光学装置、露光装置及びデバイスの製造方法
Document Type and Number:
Japanese Patent JP5267029
Kind Code:
B2
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Inventors:
Hiroyuki Hirota
Application Number:
JP2008259522A
Publication Date:
August 21, 2013
Filing Date:
October 06, 2008
Export Citation:
Assignee:
NIKON CORPORATION
International Classes:
H01L21/027; G02B3/00; G02B5/04; G02B5/08; G02B13/00; G02B19/00; G02B21/06; G03F7/20
Domestic Patent References:
JP2007150295A | ||||
JP2006284740A | ||||
JP2005243870A | ||||
JP2002353105A | ||||
JP2007227918A |
Foreign References:
WO2006085626A1 |
Attorney, Agent or Firm:
Yoshiki Hasegawa
Yoshiki Kuroki
Yoshiki Kuroki