Title:
半導体装置の製造方法及び半導体装置
Document Type and Number:
Japanese Patent JP5275056
Kind Code:
B2
Inventors:
Masamichi Suzuki
Hirotake Nishino
Tatsuo Shimizu
Miyata Masayasu
Kosuke Tatsumura
Yoshifumi Nishi
Kinoshita Atsuhiro
Hirotake Nishino
Tatsuo Shimizu
Miyata Masayasu
Kosuke Tatsumura
Yoshifumi Nishi
Kinoshita Atsuhiro
Application Number:
JP2009011185A
Publication Date:
August 28, 2013
Filing Date:
January 21, 2009
Export Citation:
Assignee:
Toshiba Corporation
International Classes:
H01L21/8238; H01L21/336; H01L27/092; H01L29/423; H01L29/49; H01L29/78; H01L29/786
Domestic Patent References:
| JP2009141161A | ||||
| JP2003068993A | ||||
| JP2006128416A | ||||
| JP2005085822A | ||||
| JP2006093670A | ||||
| JP2006084409A | ||||
| JP2008537359A |
Attorney, Agent or Firm:
Kurata Masatoshi
Satoshi Kono
Makoto Nakamura
Yoshihiro Fukuhara
Takashi Mine
Toshio Shirane
Sadao Muramatsu
Nobuhisa Nogawa
Kocho Chojiro
Naoki Kono
Katsu Sunagawa
Tetsuya Kazama
Katsumura Hiro
Shoji Kawai
Tatsushi Sato
Takashi Okada
Mihoko Horiuchi
Takenori Masanori
Takuzo Ichihara
Yamashita Gen
Satoshi Kono
Makoto Nakamura
Yoshihiro Fukuhara
Takashi Mine
Toshio Shirane
Sadao Muramatsu
Nobuhisa Nogawa
Kocho Chojiro
Naoki Kono
Katsu Sunagawa
Tetsuya Kazama
Katsumura Hiro
Shoji Kawai
Tatsushi Sato
Takashi Okada
Mihoko Horiuchi
Takenori Masanori
Takuzo Ichihara
Yamashita Gen
Previous Patent: JPS5275055
Next Patent: PROCESS FOR TREATING WASTE OIL LIQUID CONTAINING ANION AND NON-ION SUR FACE ACTIVE AGENT
Next Patent: PROCESS FOR TREATING WASTE OIL LIQUID CONTAINING ANION AND NON-ION SUR FACE ACTIVE AGENT