Title:
研磨パッド及び研磨パッドの製造方法
Document Type and Number:
Japanese Patent JP5289787
Kind Code:
B2
Inventors:
Kimio Nakayama
Nobuo Takaoka
Hirofumi Kikuchi
Mitsuru Kato
Nobuo Takaoka
Hirofumi Kikuchi
Mitsuru Kato
Application Number:
JP2008023330A
Publication Date:
September 11, 2013
Filing Date:
February 01, 2008
Export Citation:
Assignee:
KURARAY CO.,LTD.
International Classes:
B24B37/24; D01F8/04; D01F8/10; D04H3/007; D04H3/011; D04H3/105; D04H3/11; D04H3/147; D04H3/153; D06M11/00; D06M11/01; D06M15/564; H01L21/304
Domestic Patent References:
| JP2002172555A | ||||
| JP2002103234A | ||||
| JP2005068175A | ||||
| JP2005074577A |
Attorney, Agent or Firm:
Etsushi Kotani
Masataka Otani
Masaru Egawa
Masataka Otani
Masaru Egawa
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