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Patent Searching and Data


Title:
圧電駆動型MEMS素子
Document Type and Number:
Japanese Patent JP5300559
Kind Code:
B2
Inventors:
西垣 亨彦
長野 利彦
大野 浩志
川久保 隆
Application Number:
JP2009082270A
Publication Date:
September 25, 2013
Filing Date:
March 30, 2009
Export Citation:
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Assignee:
株式会社東芝
International Classes:
H01G5/16; B81B3/00; H01H57/00
Domestic Patent References:
JP2007259669A
JP2008091167A
JP2005217852A
JP2260108A
JP2008005642A
Attorney, Agent or Firm:
松山 允之
池上 徹真
須藤 章