Title:
マスクブランク、転写用マスク及び転写用マスクの製造方法
Document Type and Number:
Japanese Patent JP5305311
Kind Code:
B2
Inventors:
Hashimoto Masahiro
Atsushi Kominato
Hiroyuki Iwashita
Jun Nozawa
Atsushi Kominato
Hiroyuki Iwashita
Jun Nozawa
Application Number:
JP2012056823A
Publication Date:
October 02, 2013
Filing Date:
March 14, 2012
Export Citation:
Assignee:
HOYA CORPORATION
International Classes:
G03F1/50; G03F1/54; G03F1/74; G03F7/20; H01L21/027; G03F1/00
Domestic Patent References:
| JP2006237192A | ||||
| JP2007241065A | ||||
| JP2007241060A | ||||
| JP2007279441A | ||||
| JP200998369A |
Attorney, Agent or Firm:
Takeshi Otsuka