Title:
半導体検査装置
Document Type and Number:
Japanese Patent JP5307683
Kind Code:
B2
Inventors:
Hidei Iwai
Toyohiko Yamauchi
Nakamura common rule
Toyohiko Yamauchi
Nakamura common rule
Application Number:
JP2009235548A
Publication Date:
October 02, 2013
Filing Date:
October 09, 2009
Export Citation:
Assignee:
Hamamatsu Photonics Co., Ltd.
International Classes:
G01B11/00; G01N21/956
Domestic Patent References:
| JP4232449A | ||||
| JP2006337037A | ||||
| JP3197878A | ||||
| JP9105720A | ||||
| JP10239236A | ||||
| JP2008166306A | ||||
| JP2007163301A | ||||
| JP10267990A |
Attorney, Agent or Firm:
Yoshiki Hasegawa
Shiro Terasaki
Satoru Ishida
Shiro Terasaki
Satoru Ishida