Title:
ノズル部材、露光装置、露光方法、及びデバイス製造方法
Document Type and Number:
Japanese Patent JP5310683
Kind Code:
B2
Inventors:
Hiroyuki Nagasaka
Hirono Kono
Nishii Yasufumi
Hirono Kono
Nishii Yasufumi
Application Number:
JP2010215955A
Publication Date:
October 09, 2013
Filing Date:
September 27, 2010
Export Citation:
Assignee:
NIKON CORPORATION
International Classes:
H01L21/027; G03F7/20
Domestic Patent References:
| JP2005150734A | ||||
| JP8167549A | ||||
| JP10154659A | ||||
| JP6168866A | ||||
| JP3209479A | ||||
| JP59019912A | ||||
| JP2005020013A |
Foreign References:
| WO2001006548A1 | ||||
| WO1999049504A1 |
Attorney, Agent or Firm:
Masatake Shiga
Tadashi Takahashi
Kazuya Nishi
Tadashi Takahashi
Kazuya Nishi