Title:
気相処理装置、気相処理方法および基板
Document Type and Number:
Japanese Patent JP5315863
Kind Code:
B2
Inventors:
Takasuka Hideyoshi
Toshiyuki Kuramoto
Toshio Ueda
Masaki Ueno
Toshiyuki Kuramoto
Toshio Ueda
Masaki Ueno
Application Number:
JP2008221600A
Publication Date:
October 16, 2013
Filing Date:
August 29, 2008
Export Citation:
Assignee:
Sumitomo Electric Industries, Ltd.
International Classes:
H01L21/205; C23C16/455; C30B25/14; C30B29/38
Domestic Patent References:
| JP2002371361A | ||||
| JP20055594A | ||||
| JP2000277442A |
Attorney, Agent or Firm:
Fukami patent office