Title:
光起電力装置の製造方法
Document Type and Number:
Japanese Patent JP5318285
Kind Code:
B2
Abstract:
In order to form a texture structure of inverse pyramid concavities with high speed and accuracy, when a reflection preventing texture is formed on a surface of a photovoltaic power device by laser patterning of an etching resistance film and wet etching, a plurality of laser apertures are machined in a diagonal direction of a square to be a base of the intended pyramid concavity by using a pulse laser and a laser beam splitting means, and a laser aperture pitch between the squares is set to be larger than a pitch on the diagonal.
Inventors:
Tomoki Katsura
Kunihiko Nishimura
Nishimura Shinya
Tatsuki Okamoto
Shuichi Fujikawa
Kunihiko Nishimura
Nishimura Shinya
Tatsuki Okamoto
Shuichi Fujikawa
Application Number:
JP2012515635A
Publication Date:
October 16, 2013
Filing Date:
May 17, 2010
Export Citation:
Assignee:
Mitsubishi Electric Corporation
International Classes:
H01L31/04
Domestic Patent References:
| JPH07142755A | 1995-06-02 | |||
| JPS60158678A | 1985-08-20 | |||
| JP2004047776A | 2004-02-12 | |||
| JP2001223370A | 2001-08-17 | |||
| JP2009267247A | 2009-11-12 | |||
| JPH07142755A | 1995-06-02 | |||
| JPS60158678A | 1985-08-20 | |||
| JP2004047776A | 2004-02-12 | |||
| JP2001223370A | 2001-08-17 | |||
| JP2009267247A | 2009-11-12 |
Foreign References:
| WO2009133607A1 | 2009-11-05 | |||
| WO2009016776A1 | 2009-02-05 | |||
| WO2009133607A1 | 2009-11-05 | |||
| WO2009016776A1 | 2009-02-05 |
Attorney, Agent or Firm:
Hiroaki Sakai