Title:
キャリアガスシステムおよび基板キャリアのロードポートとの連結
Document Type and Number:
Japanese Patent JP5318765
Kind Code:
B2
Inventors:
William fosnight
Daniel Babbs
Daniel Babbs
Application Number:
JP2009528300A
Publication Date:
October 16, 2013
Filing Date:
September 14, 2007
Export Citation:
Assignee:
Brooks Automation Incorporated
International Classes:
H01L21/673; B65D85/86; B65G49/07; H01L21/205; H01L21/677
Domestic Patent References:
| JP2278746A | ||||
| JP2004527899A | ||||
| JP5286567A | ||||
| JP2006156712A |
Attorney, Agent or Firm:
Motohiko Fujimura