Title:
電磁アクチュエータ、及び真空ポンプ
Document Type and Number:
Japanese Patent JP5319069
Kind Code:
B2
More Like This:
Inventors:
Yasushi Maejima
Takeshi Kabazawa
Takeshi Kabazawa
Application Number:
JP2007014405A
Publication Date:
October 16, 2013
Filing Date:
January 25, 2007
Export Citation:
Assignee:
Edwards Co., Ltd.
International Classes:
H02K7/09; F04D19/04; F16C32/04
Domestic Patent References:
JP8061366A | ||||
JP3017424U | ||||
JP57027844U | ||||
JP2006069148A |
Attorney, Agent or Firm:
Hitoshi Nakano
Takashi Kawai
Takashi Kawai