Title:
多結晶シリコンの製造方法および製造装置
Document Type and Number:
Japanese Patent JP5321827
Kind Code:
B2
Inventors:
Nakano Mamoru
Toshiyuki Ishii
Mori Hisanori
Sakaguchi Masaaki
Naoki Masaki
Toshiyuki Ishii
Mori Hisanori
Sakaguchi Masaaki
Naoki Masaki
Application Number:
JP2009168189A
Publication Date:
October 23, 2013
Filing Date:
July 16, 2009
Export Citation:
Assignee:
Mitsubishi Materials Corporation
International Classes:
C01B33/035
Domestic Patent References:
| JP11049508A | ||||
| JP63021210A | ||||
| JP2004002138A | ||||
| JP2002068727A | ||||
| JP39023088B1 |
Attorney, Agent or Firm:
Hiroshi Chiba