Title:
アルカリエッチング排液の処理方法および装置
Document Type and Number:
Japanese Patent JP5321828
Kind Code:
B2
Inventors:
Nobuhiro Oda
Tetsuro Fukase
Tetsuro Fukase
Application Number:
JP2009172372A
Publication Date:
October 23, 2013
Filing Date:
July 23, 2009
Export Citation:
Assignee:
Kurita Water Industries Ltd.
International Classes:
C02F1/60; B01D9/02; C02F1/42; H01L21/306
Domestic Patent References:
| JP2005169191A | ||||
| JP523781A | ||||
| JP200831014A |
Attorney, Agent or Firm:
Kozo Sakakibara