Title:
処理液供給機構、処理液供給方法、液処理装置、および記憶媒体
Document Type and Number:
Japanese Patent JP5337541
Kind Code:
B2
Inventors:
Shoki Ishida
Application Number:
JP2009059573A
Publication Date:
November 06, 2013
Filing Date:
March 12, 2009
Export Citation:
Assignee:
東京エレクトロン株式会社
International Classes:
H01L21/304; B01D19/00; H01L21/027
Domestic Patent References:
| JP9260332A | ||||
| JP2002246357A | ||||
| JP2005175183A | ||||
| JP4122403A | ||||
| JP2005175058A | ||||
| JP2004049945A | ||||
| JP2000077324A |
Foreign References:
| WO2004094105A1 |
Attorney, Agent or Firm:
Hiroshi Takayama