Title:
膜厚測定装置及び膜厚測定方法
Document Type and Number:
Japanese Patent JP5338147
Kind Code:
B2
Inventors:
Tsuyoshi Terauchi
Taketoshi Takano
Yuichi Takahama
Yoshiyuki Saito
Takayuki Hirose
Taketoshi Takano
Yuichi Takahama
Yoshiyuki Saito
Takayuki Hirose
Application Number:
JP2008152124A
Publication Date:
November 13, 2013
Filing Date:
June 10, 2008
Export Citation:
Assignee:
Ihi Co., Ltd.
International Classes:
G01B7/06
Domestic Patent References:
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Attorney, Agent or Firm:
Masatake Shiga
Takashi Watanabe
Takashi Watanabe