Title:
スパッタリング装置用の交流電源
Document Type and Number:
Japanese Patent JP5339965
Kind Code:
B2
Inventors:
柳谷 好男
Application Number:
JP2009048667A
Publication Date:
November 13, 2013
Filing Date:
March 02, 2009
Export Citation:
Assignee:
株式会社アルバック
International Classes:
H02M1/34; C23C14/34; H02M7/5387; H05H1/46
Domestic Patent References:
| JP3639605B2 | ||||
| JP2005151779A | ||||
| JP279776A | ||||
| JP3195373A |
Attorney, Agent or Firm:
特許業務法人青莪