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Title:
スパッタリング装置用の交流電源
Document Type and Number:
Japanese Patent JP5339965
Kind Code:
B2
Inventors:
柳谷 好男
Application Number:
JP2009048667A
Publication Date:
November 13, 2013
Filing Date:
March 02, 2009
Export Citation:
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Assignee:
株式会社アルバック
International Classes:
H02M1/34; C23C14/34; H02M7/5387; H05H1/46
Domestic Patent References:
JP3639605B2
JP2005151779A
JP279776A
JP3195373A
Attorney, Agent or Firm:
特許業務法人青莪



 
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