試料ホルダおよび走査型透過電子顕微鏡 - National Institute for Materials Science

Title:

試料ホルダおよび走査型透過電子顕微鏡

Document Type and Number:

Japanese Patent JP5351074

Kind Code:

B2

Abstract:

To provide a sample holder capable of obtaining a confocal dark field STEM image and a three-dimensional tomogram, and to provide a scanning transmission electron microscope.

The sample holder 5, which has an XYZ drive mechanism to drive a sample mounting part 21 on which a sample is mounted, by a tube piezo element 39 in XYZ axial directions, is provided with tilt mechanisms 41, 51, 53 to incline the sample of the sample mounting part 21 centered on a Y axis, a motor to drive the tilt mechanisms 41, 51, 53, and clutches 51c, 61a which cut off that the movement of the XYZ drive mechanism is transmitted to the motor through the tilt mechanisms 41, 51, 53.

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Inventors:

Takeguchi Masaki
Tatsuo Naruse
Shunji Deguchi
Takami Ishikawa

Application Number:

JP2010039978A

Publication Date:

November 27, 2013

Filing Date:

February 25, 2010

Export Citation:

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Assignee:

National Institute for Materials Science
JEOL Ltd.

International Classes:

H01J37/20

Domestic Patent References:

JP2005044700A
JP11185686A
JP61116062U
JP8106873A
JP2008270056A

Attorney, Agent or Firm:

Fujiharu Ijima

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