Title:
基板検査用治具
Document Type and Number:
Japanese Patent JP5353968
Kind Code:
B2
Inventors:
Miyatake Tadashi
Minoru Kato
Minoru Kato
Application Number:
JP2011159518A
Publication Date:
November 27, 2013
Filing Date:
July 21, 2011
Export Citation:
Assignee:
Nidec Read Corporation
International Classes:
G01R1/06
Domestic Patent References:
| JP2004138576A | ||||
| JP2000266799A |
Attorney, Agent or Firm:
Hideaki Kitamura