Title:
分断装置
Document Type and Number:
Japanese Patent JP5353978
Kind Code:
B2
Inventors:
Hitoshi Nishio
Katsuki Nakata
Katsuki Nakata
Application Number:
JP2011192359A
Publication Date:
November 27, 2013
Filing Date:
September 05, 2011
Export Citation:
Assignee:
Samsung Diamond Industry Co., Ltd.
International Classes:
C03B33/03; B28D5/00; H01L21/301
Domestic Patent References:
| JP2001261357A | ||||
| JP2006245263A |
Foreign References:
| WO2005053925A1 | ||||
| WO2006070825A1 |
Attorney, Agent or Firm:
Yoshitake Hidetoshi
Takahiro Arita
Takahiro Arita