Title:
コンポーネントの製造方法、特にマイクロメカニカルコンポーネント及び/又はマイクロ流体コンポーネント及び/又はマイクロエレクトロニクスコンポーネントの製造方法及びコンポーネント
Document Type and Number:
Japanese Patent JP5355392
Kind Code:
B2
Abstract:
A method for producing a component, and a component, in particular a micromechanical and/or microfluidic and/or microelectronic component, is provided, the component including at least one patterned material region, and in a first step the patterned material region is produced in that microparticles of a first material are embedded in a matrix of a second material, and in a second step the patterned material region is rendered porous by etching using a dry etching method or a gas-phase etching method.
Inventors:
Tino Fuchs
Christina Reinenbach
Christina Reinenbach
Application Number:
JP2009517058A
Publication Date:
November 27, 2013
Filing Date:
May 04, 2007
Export Citation:
Assignee:
ROBERT BOSCH GMBH
International Classes:
B81C1/00; B01D39/20
Domestic Patent References:
| JP2004237430A | ||||
| JP2002241532A | ||||
| JP62054734A | ||||
| JP9157062A | ||||
| JP2003138056A | ||||
| JP11021369A | ||||
| JP11206877A | ||||
| JP2005286334A | ||||
| JP2000290085A |
Attorney, Agent or Firm:
Toshio Yano
Toshiomi Yamazaki
Takuya Kuno
Kimihiro Hoshi
Hiroyasu Ninomiya
Einzel Felix-Reinhard
Toshiomi Yamazaki
Takuya Kuno
Kimihiro Hoshi
Hiroyasu Ninomiya
Einzel Felix-Reinhard