Login| Sign Up| Help| Contact|

Patent Searching and Data


Title:
蒸着装置および回収装置
Document Type and Number:
Japanese Patent JP5362920
Kind Code:
B2
Abstract:
At least a part of a shield plate (3) and a shutter (4) is constituted by a plurality of small pieces (3a, 3b, 4a, and 4b) linked to one another, and each of the plurality of small pieces (3a, 3b, 4a, and 4b) is provided with a linking section or linking sections by which each of the plurality of small pieces is linkable to one another and delinkable from one another.

More Like This:
JPS6043914[Title of the Invention] A sputtering film production method
JP3765475Ti-Si ALLOY BASED TARGET MATERIAL, PRODUCTION METHOD THEREFOR AND FILM COATING METHOD
JPH05202466DEVICE FOR LAMINATING WORK SURFACE
Inventors:
Sonoda
Shinichi Kawato
Satoshi Inoue
Satoshi Hashimoto
Application Number:
JP2012546868A
Publication Date:
December 11, 2013
Filing Date:
November 28, 2011
Export Citation:
Click for automatic bibliography generation   Help
Assignee:
Sharp Corporation
International Classes:
C23C14/24; C23C14/12; H01L51/50; H05B33/10
Domestic Patent References:
JPH06196476A1994-07-15
JP2008081770A2008-04-10
JPS6230877A1987-02-09
JPH0452269A1992-02-20
JP2009068071A2009-04-02
JPH06196476A1994-07-15
JP2008081770A2008-04-10
JPS6230877A1987-02-09
JPH0452269A1992-02-20
JP2009068071A2009-04-02
Foreign References:
WO2009101795A12009-08-20
WO2009101795A12009-08-20
Attorney, Agent or Firm:
Kenzo Hara International Patent Office



 
Previous Patent: JPS5362919

Next Patent: FRAME SYNCHRONOUS CIRCUIT