Title:
振動の存在下で用いる位相シフト干渉方法
Document Type and Number:
Japanese Patent JP5363585
Kind Code:
B2
Abstract:
A phase-shifting interferometry (PSI) method and corresponding system including: (i) recording an interferogram for each phase in a sequence of phases between test light reflected from a test surface and reference light reflected from a reference surface, the test and reference light being derived from a common source, each interferogram corresponding to an intensity pattern produced by interfering the reflected test light with the reflected reference light, the interferograms defining an interferometry signal for each of different transverse locations of a cavity defined by the test and reference surfaces, each interferometry signal including a series of intensity values corresponding to the sequence of phases, with the difference between each pair of phases in the sequence defining a corresponding phase shift increment; (ii) calculating an initial phase map for the cavity based on at least some of the recorded interferograms; (iii) calculating an estimate for each of at least some of the phase shift increments based on the initial phase map and at least some of the recorded interferograms; and (iv) calculating an improved phase map based on the calculated estimates for the phase shift increments and at least some of the recorded interferograms.
Inventors:
Leslie Erdec
Application Number:
JP2011536415A
Publication Date:
December 11, 2013
Filing Date:
November 10, 2009
Export Citation:
Assignee:
Zygo Corporation
International Classes:
G01B9/02
Domestic Patent References:
| JP9133505A |
Foreign References:
| US20030160968 | ||||
| US20050046864 | ||||
| US20040174526 |
Attorney, Agent or Firm:
Kenji Sugimura
Groundwork Kenichi
Tsubouchi Shin
Groundwork Kenichi
Tsubouchi Shin