Title:
表示装置およびこれに用いるCu合金膜
Document Type and Number:
Japanese Patent JP5368717
Kind Code:
B2
Inventors:
Takashi Onishi
Aya Hino
Hiroshi Goto
Masao Mizuno
Hirotaka Ito
Aya Hino
Hiroshi Goto
Masao Mizuno
Hirotaka Ito
Application Number:
JP2008038981A
Publication Date:
December 18, 2013
Filing Date:
February 20, 2008
Export Citation:
Assignee:
KABUSHIKI KAISHA KOBE SEIKO SHO
International Classes:
H01L29/786; G02F1/1368; G09F9/30; H01L21/28; H01L21/285; H01L21/3205; H01L21/768; H01L23/532; H01L29/417; H01L29/423; H01L29/49
Domestic Patent References:
| JP5047760A | ||||
| JP2005191363A | ||||
| JP2006336106A |
Foreign References:
| WO2006025347A1 |
Attorney, Agent or Firm:
Kyuichi Ueki
Hisahiko Ueki
Tadashi Sugakawa
Hiroaki Ito
Akemi Takeoka
Hisahiko Ueki
Tadashi Sugakawa
Hiroaki Ito
Akemi Takeoka
Previous Patent: JPS5368716
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