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Title:
絶縁膜形成用感光性樹脂組成物
Document Type and Number:
Japanese Patent JP5369420
Kind Code:
B2
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Inventors:
Nami Onimaru
Atsushi Ito
Hirofumi Goto
Application Number:
JP2007275306A
Publication Date:
December 18, 2013
Filing Date:
October 23, 2007
Export Citation:
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Assignee:
JSR CORPORATION
International Classes:
C08L61/06; C08K5/5415; C08L25/04; C09D5/25; C09D7/12; C09D125/04; C09D161/06; H01L21/312
Domestic Patent References:
JP2007078796A
JP2007056109A
Foreign References:
WO2006129875A1
Attorney, Agent or Firm:
Patent corporation ssinpat
Koji Makimura
Chihata Takahata



 
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