Title:
研磨液
Document Type and Number:
Japanese Patent JP5375025
Kind Code:
B2
Inventors:
Munehiro Ota
Hidekazu Sato
Yosuke Hoshi
Shigeru Nobe
Kazuhiro Enomoto
Hidekazu Sato
Yosuke Hoshi
Shigeru Nobe
Kazuhiro Enomoto
Application Number:
JP2008274327A
Publication Date:
December 25, 2013
Filing Date:
October 24, 2008
Export Citation:
Assignee:
Hitachi Chemical Co., Ltd.
International Classes:
H01L21/304; B24B37/00; C09K3/14
Domestic Patent References:
| JP2001007059A | ||||
| JP2001185514A | ||||
| JP2001284296A | ||||
| JP2001507739A | ||||
| JP2004269577A | ||||
| JP2005353681A | ||||
| JP2006520530A | ||||
| JP2008519466A |
Foreign References:
| WO1999031195A1 | ||||
| WO1999043761A1 |
Attorney, Agent or Firm:
Yoshiki Hasegawa
Junichiro Sakamaki
Tomoya Furoshita
Yoshinori Shimizu
Junichiro Sakamaki
Tomoya Furoshita
Yoshinori Shimizu