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Title:
光照射によって誘電率が変化する膜を用いた電子デバイス
Document Type and Number:
Japanese Patent JP5382711
Kind Code:
B2
Abstract:

To provide a film having permittivity which can be controlled by external stimulation and can be varied by light irradiation, and to provide an electronic device using the same.

A thin film transistor 20 includes a glass substrate 21, a gate electrode 22, a gate insulating film 23, a semiconductor layer (active layer) 24, a source electrode 25 and a drain electrode 26. The gate electrode 22, the gate insulating film 23 and the semiconductor layer 24 are laminated on the glass substrate 21 in this order. The source electrode 25 and the drain electrode 26 are formed on the semiconductor layer 24. The gate insulating film 23 is formed by spin-coating the gate insulating film formed on the glass substrate with a solution containing an organic polymer and a compound dispersed in the organic polymer. The compound is at least one kind of a compound selected from a compound represented by a formula (1) and a compound represented by a formula (2). In the formula (1), R1is a hydrogen atom or alkyl of 1-10C, R2is aromatic a hydrocarbon of 6-20C, X is anion, and q is equal to the valence of X. In the formula (2), R3is one of a hydrogen atom, alkyl, hydroxyl, alkyloxy, acyloxy, alkyloxycarbonyl, an alicyclic ring, an aromatic ring, a complex aromatic ring and the like, and R4-R6is one of a hydrogen atom, alkyl, an alicyclic ring, an aromatic ring, and an complex aromatic ring, independently.

COPYRIGHT: (C)2011,JPO&INPIT


Inventors:
Hideyuki Murata
Heisuke Sakai
Shunichi Fukuzumi
Kei Okubo
Motonobu Murakami
Application Number:
JP2009205923A
Publication Date:
January 08, 2014
Filing Date:
September 07, 2009
Export Citation:
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Assignee:
National University Corporation Japan Advanced Institute of Science and Technology
National University Corporation Osaka University
International Classes:
H01L21/312; C08J5/18; H01B17/56; H01G7/00; H01L21/283; H01L21/822; H01L27/04; H01L27/10; H01L29/786; H01L51/05; H01L51/30
Domestic Patent References:
JP2004230762A
JP6507661A
Attorney, Agent or Firm:
Koichi Kamata
Shigeru Kuroda