Title:
ガラス板の研磨状況をモニタリングする装置及び方法
Document Type and Number:
Japanese Patent JP5382741
Kind Code:
B2
Inventors:
Moon, Won-Jae
Oh, Hyun-Youn
Lee, Dae-Aeon
Song, Jae-iku
Kim, Yoon-Kuk
Chun, Cucule
Chun, Hyun-Chur
Oh, Hyun-Youn
Lee, Dae-Aeon
Song, Jae-iku
Kim, Yoon-Kuk
Chun, Cucule
Chun, Hyun-Chur
Application Number:
JP2011053338A
Publication Date:
January 08, 2014
Filing Date:
March 10, 2011
Export Citation:
Assignee:
LG HAUSYS,LTD.
International Classes:
B24B37/34; B24B7/24; B24B37/00; B24B37/005; B24B49/10; B24B49/16
Domestic Patent References:
| JP2005034992A | ||||
| JP8099265A | ||||
| JP2008528300A | ||||
| JP2004330362A | ||||
| JP2011101908A | ||||
| JP2004249458A |
Attorney, Agent or Firm:
Longhua International Patent Service Corporation
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