Title:
エッチング方法
Document Type and Number:
Japanese Patent JP5382892
Kind Code:
B2
Inventors:
Terukazu Ishida
Exit Yukari
Sato Mina
Exit Yukari
Sato Mina
Application Number:
JP2012285223A
Publication Date:
January 08, 2014
Filing Date:
December 27, 2012
Export Citation:
Assignee:
MEC COMPANY
International Classes:
H01L21/308; C23F1/18
Domestic Patent References:
| JP2001200380A | ||||
| JP6287774A |
Foreign References:
| WO2011158634A1 | ||||
| WO2009066750A1 |
Attorney, Agent or Firm:
Patent Business Corporation Unias International Patent Office
Previous Patent: JPS5382891
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