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Patent Searching and Data


Title:
搬送機構
Document Type and Number:
Japanese Patent JP5385016
Kind Code:
B2
Inventors:
Toshifumi Matsuyama
Okumei Kengo
Application Number:
JP2009136573A
Publication Date:
January 08, 2014
Filing Date:
June 05, 2009
Export Citation:
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Assignee:
Disco Co., Ltd.
International Classes:
H01L21/677; B23Q7/04; B65H5/10
Domestic Patent References:
JP6114759A
JP3170279A
JP7276447A
JP2003163181A
JP6177244A
Attorney, Agent or Firm:
Naozumi Ono
Sachiko Okunuki