Title:
信号処理装置
Document Type and Number:
Japanese Patent JP5389311
Kind Code:
B2
Abstract:
A signal processing device includes a converting unit, a filtering unit, a differential computing unit, and a phase difference computing unit. The converting unit samples two alternating signals with a predetermined period and converts the sampled level values into digital alternating signal data. The filtering unit filters the two digital alternating signal data generated by the converting unit so as to abstract digital alternating signal data having a predetermined frequency, and the filtering unit comprises an adaptive digital filter. The differential computing unit computes differentials of the digital alternating signal data generated by the filtering unit. The phase difference computing unit computes phase difference using the two digital alternating signal data generated by the filtering unit, and the two digital alternating signal data generated by the differential computing unit.
Inventors:
Ryohei Tanaka
Kitano Toyokazu
Kitano Toyokazu
Application Number:
JP2005123270A
Publication Date:
January 15, 2014
Filing Date:
April 21, 2005
Export Citation:
Assignee:
Daihen Co., Ltd.
International Classes:
G01R25/00; H01L21/3065
Domestic Patent References:
| JP11287830A | ||||
| JP1090311A | ||||
| JP2000338141A | ||||
| JP6188683A | ||||
| JP11308075A | ||||
| JP546168A | ||||
| JP2004214963A |
Attorney, Agent or Firm:
Minoru Yoshida
Tatsuya Tanaka
Tsukasa Senba
Takashi Shiotani
Hiroshi Furusawa
Tatsuya Tanaka
Tsukasa Senba
Takashi Shiotani
Hiroshi Furusawa
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