Title:
基板処理方法および基板処理装置
Document Type and Number:
Japanese Patent JP5390873
Kind Code:
B2
Inventors:
Yoshizumi Asuka
Hiroaki Ishii
Takashi Izuda
Hiroaki Ishii
Takashi Izuda
Application Number:
JP2009017116A
Publication Date:
January 15, 2014
Filing Date:
January 28, 2009
Export Citation:
Assignee:
Dainippon Screen Mfg. Co., Ltd.
International Classes:
H01L21/304; G02F1/13; G11B5/84; H01L21/027
Domestic Patent References:
| JP2008540994A | ||||
| JP2007263485A | ||||
| JP2006295202A | ||||
| JP9038595A | ||||
| JP2004128495A | ||||
| JP2004111668A |
Foreign References:
| WO2006041077A1 |
Attorney, Agent or Firm:
Inaoka cultivation
Mio Kawasaki
Mio Kawasaki