Title:
フィルタ装置、照明装置、露光装置、及びデバイス製造方法
Document Type and Number:
Japanese Patent JP5391641
Kind Code:
B2
Inventors:
Motoo Koyama
Application Number:
JP2008269828A
Publication Date:
January 15, 2014
Filing Date:
October 20, 2008
Export Citation:
Assignee:
NIKON CORPORATION
International Classes:
G03F7/20; G02B5/00; G02B7/00; G02B19/00; H01L21/027
Domestic Patent References:
JP5257068A | ||||
JP9127418A | ||||
JP2003092253A | ||||
JP2006059834A | ||||
JP8220318A | ||||
JP2007158225A | ||||
JP2008153561A | ||||
JP2006203217A | ||||
JP2006178395A | ||||
JP2003315690A |
Attorney, Agent or Firm:
Masatake Shiga
Tadashi Takahashi
Kazuya Nishi
Tadashi Takahashi
Kazuya Nishi
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