Title:
透過型電子顕微鏡用二軸傾斜のインサイチュ強度、電気的特性の総合試験試料ホルダー
Document Type and Number:
Japanese Patent JP5394596
Kind Code:
B2
Abstract:
A double tilt sample holder for in-situ measuring mechanical and electrical properties of microstructures in transmission electron microscope (TEM) is provided. The sample holder includes a home-made hollow sample holder body, a sensor for measuring mechanical/electrical properties, a pressing piece, a sample holder head, a sensor carrier. The sensor for measuring mechanical/electrical properties is fixed on the sensor carrier on the sample holder head by the pressing piece, while the sensor carrier is connected to the sample holder head through a pair of supporting shafts located on sides of the sample holder head. The sensor carrier can tilt within the plane perpendicular to the ample holder head by revolving around the supporting shafts (i.e. tilting along Y axis at an angle of ±30°). The sample holder also allows obtaining mechanical/electrical parameters concurrently.
Inventors:
Han, Xiao Dong
Yui, Yong Hai
Chang, Yufei
Ryu, bread
Chen, Khun
Wang, Xiao Dong
Chan, Tsai
Yui, Yong Hai
Chang, Yufei
Ryu, bread
Chen, Khun
Wang, Xiao Dong
Chan, Tsai
Application Number:
JP2013516990A
Publication Date:
January 22, 2014
Filing Date:
July 11, 2011
Export Citation:
Assignee:
Beijing Institute of Technology
International Classes:
H01J37/20
Domestic Patent References:
| JP2007303946A | ||||
| JP2009117196A | ||||
| JP2006105744A | ||||
| JP2010108853A |
Foreign References:
| CN101275895A |
Attorney, Agent or Firm:
Atsushi Nakajima
Kato Kazunori
Katsuichi Nishimoto
Kato Kazunori
Katsuichi Nishimoto