Title:
軟磁性膜形成用Fe-Co系合金スパッタリングターゲット材
Document Type and Number:
Japanese Patent JP5397755
Kind Code:
B2
Inventors:
Tomonori Ueno
Mitsuharu Fujimoto
Atsushi Fukuoka
Mitsuharu Fujimoto
Atsushi Fukuoka
Application Number:
JP2009135801A
Publication Date:
January 22, 2014
Filing Date:
June 05, 2009
Export Citation:
Assignee:
Hitachi Metals Co., Ltd.
International Classes:
C23C14/34; C22C19/07; C22C38/00; G11B5/667
Domestic Patent References:
| JP2006265653A | ||||
| JP2007197811A | ||||
| JP2009068100A | ||||
| JP2007297688A | ||||
| JP2007284741A | ||||
| JP2008121071A | ||||
| JP2008189996A | ||||
| JP2008260969A | ||||
| JP2009203537A |
Foreign References:
| WO2009104509A1 |
Other References:
V.Bekker, et al.,Development and optimisation of thin soft ferromagnetic Fe-Co-Ta-N and Fe-Co-Al-N films with in-plane uniaxial anisotropy for HF applications,Journal of Magnetism and Magnetic Materials,ELSEVIER,2005年 3月14日,Vol.296,pp.37-45