Title:
１次係数および２次係数の温度補償型共振子
Document Type and Number:
Japanese Patent JP5400093
Kind Code:
B2
Abstract:
The resonator has a micro electro-mechanical system body i.e. bar, with a core formed of a plate formed at a cut angle in a quartz crystal determining first and second orders temperature coefficients. The body includes a coating deposited partially on the core, where the cut angle of the plate and thickness (d) of the coating are adapted according to thermoelastic coefficients of the coating to obtain first and second orders temperature coefficients of the resonator in order to render the temperature coefficients to be zero. The coating is made of germanium oxide and tantalum oxide.
Inventors:
Thierry Haessler
シルヴィオ Dara Piazza
シルヴィオ Dara Piazza
Application Number:
JP2011120268A
Publication Date:
January 29, 2014
Filing Date:
May 30, 2011
Export Citation:
Assignee:
The Swatch group research and development Limited
International Classes:
H03H9/02; B81B3/00; H01L41/09; H01L41/18; H01L41/22; H01L41/23; H03H9/19; H03H9/215
Attorney, Agent or Firm:
Masaki Yamakawa
Shigeki Yamakawa
Shigeki Yamakawa