Title:
フォトレジスト用化合物、フォトレジスト液、およびこれを用いるエッチング方法
Document Type and Number:
Japanese Patent JP5401042
Kind Code:
B2
Inventors:
Tetsuya Watanabe
Yoshihisa Usami
Yoshihisa Usami
Application Number:
JP2008047130A
Publication Date:
January 29, 2014
Filing Date:
February 28, 2008
Export Citation:
Assignee:
Fuji Photo Film Co., Ltd.
International Classes:
H01L21/027; C07D209/18; C07D213/57; C07D215/12; C07D263/32; C07D263/56; C07D277/20; C07D277/30; C07D277/64; C07D339/06; C07D409/04; C07D417/04; C09B23/00; G03F7/004; G03F7/36; G03F7/40; H01L21/3065
Attorney, Agent or Firm:
Patent business corporation patent firm Sykes