Title:
荷電粒子応用装置
Document Type and Number:
Japanese Patent JP5401408
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a charged particle application device that prevents a drift from being generated owing to a temperature difference between the charged particle application device and a sample holder.SOLUTION: The charged particle application device includes a fixing mechanism which catches and fixes a tip of the sample holder holding a sample, a spring mechanism which applies opposite-directional tension larger than force drawing the sample holder into the charged particle application device with a vacuum atmosphere in the charged particle application device, and a movement fulcrum used when the sample holder moves in order to move a position of the sample held by the sample holder.
Inventors:
Onishi 崇
Ueda 浩 size
Tetsuya Akashi
Shinji Aizawa
Ueda 浩 size
Tetsuya Akashi
Shinji Aizawa
Application Number:
JP2010162412A
Publication Date:
January 29, 2014
Filing Date:
July 20, 2010
Export Citation:
Assignee:
Hitachi High-Technologies Corp.
International Classes:
H01J37/20
Attorney, Agent or Firm:
Manabu Inoue
Yuji Toda
Shigemi Iwasaki
Yuji Toda
Shigemi Iwasaki