Title:
合成石英ガラス基板用研磨剤
Document Type and Number:
Japanese Patent JP5407188
Kind Code:
B2
Inventors:
Daimi Harada
Masaki Takeuchi
Masaki Takeuchi
Application Number:
JP2008152940A
Publication Date:
February 05, 2014
Filing Date:
June 11, 2008
Export Citation:
Assignee:
Shin-Etsu Chemical Co., Ltd.
International Classes:
B24B37/00; C03C19/00; C09K3/14; G03F1/60
Domestic Patent References:
| JP9137155A | ||||
| JP2002313759A | ||||
| JP2005120180A | ||||
| JP2002241739A | ||||
| JP2004323840A | ||||
| JP2006128552A | ||||
| JP2004143429A |
Foreign References:
| WO2008005164A1 | ||||
| WO2008004534A1 |
Attorney, Agent or Firm:
Takashi Kojima
Saori Shigematsu
Katsunari Kobayashi
Takeshi Ishikawa
Saori Shigematsu
Katsunari Kobayashi
Takeshi Ishikawa