基板収納容器 - Shin-Etsu Polymer Co., Ltd.

Title:

基板収納容器

Document Type and Number:

Japanese Patent JP5409224

Kind Code:

B2

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Inventors:

Ogawa Tsutomu

Application Number:

JP2009211266A

Publication Date:

February 05, 2014

Filing Date:

September 14, 2009

Export Citation:

Assignee:

Shin-Etsu Polymer Co., Ltd.

International Classes:

H01L21/673; B65D85/86

Domestic Patent References:

JP2007142189A

Attorney, Agent or Firm:

Eiichiro Shimazaki
Naotaka Kono
Kanji Arai
Akiko Ishii

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