Title:
画像作成方法、基板検査方法、その画像作成方法又はその基板検査方法を実行させるためのプログラムを記録した記録媒体及び基板検査装置
Document Type and Number:
Japanese Patent JP5409677
Kind Code:
B2
Abstract:
An image creation method of creating a filter image for removing a pseudo defect to inspect presence/absence of a defect on a substrate includes a filter image creation step of creating the filter image by replacing a picture element value of any one of picture elements located on a circumference of a circle about a center position of a registered image with a maximum value of picture element values of a plurality of picture elements selected from among the picture elements located on the circumference.
Inventors:
Hiroshi Tomita
Kazuya Kuno
Nao Nishiyama
Kazuya Kuno
Nao Nishiyama
Application Number:
JP2011058277A
Publication Date:
February 05, 2014
Filing Date:
March 16, 2011
Export Citation:
Assignee:
東京エレクトロン株式会社
International Classes:
G01N21/956; G06T1/00; H01L21/66
Domestic Patent References:
| JP2004108845A | ||||
| JP2008199033A | ||||
| JP2008004863A | ||||
| JP61283852A |
Attorney, Agent or Firm:
Tadahiko Ito