Title:
ライン圧力測定を伴う差圧センサ
Document Type and Number:
Japanese Patent JP5409965
Kind Code:
B2
Abstract:
A pressure sensor assembly for sensing a pressure of a process fluid includes a sensor body having a cavity formed therein and first and second openings to the cavity configured to apply first and second pressures. A diaphragm in the cavity separates the first opening from the second opening and is configured to deflect in response to a differential pressure between the first pressure and the second pressure. A capacitance based deformation sensor is provided and configured to sense deformation of the sensor body in response to a line pressure applied to the sensor body.
Inventors:
Schulte, John Pea
Tyson, David Gee
Kurosynski, Andrew Jay
Tyson, David Gee
Kurosynski, Andrew Jay
Application Number:
JP2013514216A
Publication Date:
February 05, 2014
Filing Date:
June 01, 2011
Export Citation:
Assignee:
Rosemount Incorporated
International Classes:
G01L9/12; G01L13/06
Domestic Patent References:
JP2008542726A | ||||
JP2002544514A | ||||
JP2008542717A | ||||
JP3190337B1 | ||||
JP3255327A |
Attorney, Agent or Firm:
Patent business corporation Tsukuni
Hajime Tsukuni
Yasuo Yanagibashi
Satoko Ito
Keiko Ozawa
Toshio Miyake
Yasuhiro Oguni
Yoko Tanaka
Yoshinori Ikukawa
Akio Shibata
Yukio Sakamoto
Hajime Tsukuni
Yasuo Yanagibashi
Satoko Ito
Keiko Ozawa
Toshio Miyake
Yasuhiro Oguni
Yoko Tanaka
Yoshinori Ikukawa
Akio Shibata
Yukio Sakamoto