Title:
加工装置
Document Type and Number:
Japanese Patent JP5412261
Kind Code:
B2
Inventors:
Susumu Nomiya
Application Number:
JP2009281498A
Publication Date:
February 12, 2014
Filing Date:
December 11, 2009
Export Citation:
Assignee:
Disco Co., Ltd.
International Classes:
H01L21/677; B23Q7/04; B24B7/00; B24B41/06; B65G49/07; H01L21/304
Domestic Patent References:
JP2003243483A | ||||
JP2009170761A | ||||
JP62126650A | ||||
JP2009147078A | ||||
JP2008016658A | ||||
JP2007258450A | ||||
JP2009056518A | ||||
JP2001284303A |
Attorney, Agent or Firm:
Isao Sasaki
Kyoko Kawamura
Ken Kubo
Kyoko Kawamura
Ken Kubo