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Patent Searching and Data


Title:
加工装置
Document Type and Number:
Japanese Patent JP5412261
Kind Code:
B2
Inventors:
Susumu Nomiya
Application Number:
JP2009281498A
Publication Date:
February 12, 2014
Filing Date:
December 11, 2009
Export Citation:
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Assignee:
Disco Co., Ltd.
International Classes:
H01L21/677; B23Q7/04; B24B7/00; B24B41/06; B65G49/07; H01L21/304
Domestic Patent References:
JP2003243483A
JP2009170761A
JP62126650A
JP2009147078A
JP2008016658A
JP2007258450A
JP2009056518A
JP2001284303A
Attorney, Agent or Firm:
Isao Sasaki
Kyoko Kawamura
Ken Kubo