Title:
表面保護用シート
Document Type and Number:
Japanese Patent JP5415732
Kind Code:
B2
Inventors:
Okuchi Shigeto
Kubota Shin
Kubota Shin
Application Number:
JP2008238384A
Publication Date:
February 12, 2014
Filing Date:
September 17, 2008
Export Citation:
Assignee:
LINTEC CORPORATION
International Classes:
H01L21/304; B24B7/22
Domestic Patent References:
JP2129282A | ||||
JP2001354930A | ||||
JP2002155249A | ||||
JP2002348554A | ||||
JP2004128115A | ||||
JP2005150235A | ||||
JP2005191296A | ||||
JP2008016624A |
Attorney, Agent or Firm:
Maeda/Suzuki International Patent Corporation
Hitoshi Maeda
Toru Suzuki
Hitoshi Maeda
Toru Suzuki