Title:
圧力センサアセンブリ、圧力センサおよびライン圧力測定方法
Document Type and Number:
Japanese Patent JP5416967
Kind Code:
B2
Abstract:
A pressure sensor assembly for sensing a pressure of a process fluid includes a sensor body having a cavity formed therein to couple to a process fluid pressure. A deflectable diaphragm in the cavity deflects in response to the first and second process fluid pressures. A first primary electrode couples to a wall of the cavity and forms a first primary capacitor between the first primary electrode and the deflectable diaphragm. A first secondary electrode couples to the wall of the cavity to form a first secondary capacitor between the first secondary electrode and the deflectable diaphragm. A second primary electrode and second secondary electrode are preferably coupled to a wall of the cavity opposite the first. Line pressure of the process fluid is determined based upon variation in the secondary capacitors relative to the primary capacitors.
Inventors:
Halsin, Donald, Yi.
Wilcock, Charles, Earl.
Wilcock, Charles, Earl.
Application Number:
JP2008513709A
Publication Date:
February 12, 2014
Filing Date:
May 25, 2006
Export Citation:
Assignee:
Rosemount Incorporated
International Classes:
G01L13/06
Domestic Patent References:
| JP2002544514A | ||||
| JP56021739U |
Attorney, Agent or Firm:
Kiyotaka Sakamoto
Kaori Tanaka
Sanji Tanabe
Kaori Tanaka
Sanji Tanabe