Title:
反射防止コーティング組成物
Document Type and Number:
Japanese Patent JP5418906
Kind Code:
B2
Abstract:
The present invention relates to an antireflective coating composition comprising, (i) a thermal acid generator; (ii) a crosslinkable polymer comprising at least one aromatic group; and, (iii) a polymeric crosslinker comprising at least one unit of structure (6), where R11 to R13 is independently selected from H, (C1-C6) alkyl and aromatic group, R14 and R15 are independently (C1-C10) alkyl. The invention also relates to a process for imaging the antireflective coating composition of the present invention.
Inventors:
Kim Wookyu
Wu Hempen
Abdullah David Jay
Naser Mark
Lou Pin Hung
Chan Lucy
Rahman M. Darryl
Wu Hempen
Abdullah David Jay
Naser Mark
Lou Pin Hung
Chan Lucy
Rahman M. Darryl
Application Number:
JP2009532907A
Publication Date:
February 19, 2014
Filing Date:
October 15, 2007
Export Citation:
Assignee:
az Electronic Materials ip Co., Ltd.
International Classes:
C09D125/16; C09D7/12; C09D133/06; G03F7/11; G03F7/32; G03F7/38
Domestic Patent References:
| JP2003195509A | ||||
| JP2004029706A | ||||
| JP2005010486A | ||||
| JP2007128036A | ||||
| JP2001192411A | ||||
| JP2002530696A | ||||
| JP2005015763A |
Attorney, Agent or Firm:
Mitsufumi Esaki
Blacksmith
Katsunori Uenishi
Ichiro Torayama
Blacksmith
Katsunori Uenishi
Ichiro Torayama